Engineering and TechnologyMicrosystems & Nanoengineering
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement
X. Gong, Y. Kuo, et al.
This groundbreaking research, conducted by Xuewen Gong, Yu-Chun Kuo, Guodong Zhou, Wen-Jong Wu, and Wei-Hsin Liao, showcases a novel 1-axis piezoelectric MEMS accelerometer designed for low-noise applications. With impressive charge sensitivity and a natural frequency, this device is poised to advance structural health monitoring technologies.
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