This paper presents a novel polymer piezoelectric MEMS accelerometer design using PVDF films, fabricated using laser micromachining and 3D stereolithography. The design achieved a sensitivity of 21.82 pC/g (126.32 mV/g), a 5% flat band of 58.5 Hz, and a noise density of 6.02 µg/v/Hz, rivaling state-of-the-art PZT-based counterparts and surpassing several commercial accelerometers. The design also features a 10-times smaller device area and a 4-times larger flat band than previous organic piezoelectric MEMS accelerometers.
Publisher
Microsystems & Nanoengineering
Published On
Authors
Chang Ge, Edmond Cretu
Tags
MEMS
piezoelectric
accelerometer
PVDF films
laser micromachining
3D stereolithography
sensitivity
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