logo
ResearchBunny Logo
A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Engineering and Technology

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

C. Ge and E. Cretu

Discover groundbreaking advancements in sensor technology with this innovative polymer piezoelectric MEMS accelerometer design by Chang Ge and Edmond Cretu. Utilizing state-of-the-art fabrication techniques, this device not only achieves impressive sensitivity but also outperforms traditional counterparts in size and noise performance.

00:00
00:00
Playback language: English
Abstract
This paper presents a novel polymer piezoelectric MEMS accelerometer design using PVDF films, fabricated using laser micromachining and 3D stereolithography. The design achieved a sensitivity of 21.82 pC/g (126.32 mV/g), a 5% flat band of 58.5 Hz, and a noise density of 6.02 µg/v/Hz, rivaling state-of-the-art PZT-based counterparts and surpassing several commercial accelerometers. The design also features a 10-times smaller device area and a 4-times larger flat band than previous organic piezoelectric MEMS accelerometers.
Publisher
Microsystems & Nanoengineering
Published On
Authors
Chang Ge, Edmond Cretu
Tags
MEMS
piezoelectric
accelerometer
PVDF films
laser micromachining
3D stereolithography
sensitivity

Related Publications

Explore these studies to deepen your understanding of the subject.

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement
Engineering and Technology

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

X. Gong, Y. Kuo, et al.

Record-high Antarctic Peninsula temperatures and surface melt in February 2022: a compound event with an intense atmospheric river
Earth Sciences

Record-high Antarctic Peninsula temperatures and surface melt in February 2022: a compound event with an intense atmospheric river

I. V. Gorodetskaya, C. Durán-alarcón, et al.

Ovarian follicular dynamics, progesterone concentrations, pregnancy rates and transcriptional patterns in *Bos indicus* females with a high or low antral follicle count
Veterinary Science

Ovarian follicular dynamics, progesterone concentrations, pregnancy rates and transcriptional patterns in *Bos indicus* females with a high or low antral follicle count

M. A. D. Lima, F. Morotti, et al.

Sea urchin-like microstructure pressure sensors with an ultra-broad range and high sensitivity
Engineering and Technology

Sea urchin-like microstructure pressure sensors with an ultra-broad range and high sensitivity

X. Wang, L. Tao, et al.

Listen, Learn & Level Up
Over 10,000 hours of research content in 25+ fields, available in 12+ languages.
No more digging through PDFs, just hit play and absorb the world's latest research in your language, on your time.
listen to research audio papers with researchbunny