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An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

Engineering and Technology

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

X. Gong, Y. Kuo, et al.

This groundbreaking research, conducted by Xuewen Gong, Yu-Chun Kuo, Guodong Zhou, Wen-Jong Wu, and Wei-Hsin Liao, showcases a novel 1-axis piezoelectric MEMS accelerometer designed for low-noise applications. With impressive charge sensitivity and a natural frequency, this device is poised to advance structural health monitoring technologies.

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