Controlled on-chip fabrication of large-scale perovskite single crystal arrays for high-performance laser and photodetector integration

Metal halide perovskites possess intriguing optoelectronic properties, however, the lack of precise control of on-chip fabrication of the large-scale perovskite single crystal arrays restricts its application in integrated devices. Here, we report a space confinement and antisolvent-assisted crystallization method for the homogeneous perovskite single crystal arrays spanning 100 square centimeter areas. This method enables precise control over the crystal arrays, including different array shapes and resolutions with less than 10%-pixel position variation, tunable pixel dimensions from 2 to 8 µm as well as the in-plane rotation of each pixel. The crystal pixel could serve as a high-quality whispering gallery mode (WGM) microcavity with a quality factor of 2915 and a threshold of 4.14 µJ cm². Through directly on-chip fabrication on the patterned electrodes, a vertical structured photodetector array is demonstrated with stable photoswitching behavior and the capability to image the input patterns, indicating the potential application in the integrated systems of this method.

Zhangsheng Xu, Xun Han, Wenqiang Wu, Fangtao Li, Ru Wang, Hui Lu, Qiuchun Lu, Binghui Ge, Ningyan Cheng, Xiaoyi Li, Guangjie Yao, Hao Hong, Kaihui Liu, Caofeng Pan