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An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

Engineering and Technology

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

X. Gong, Y. Kuo, et al.

This groundbreaking research, conducted by Xuewen Gong, Yu-Chun Kuo, Guodong Zhou, Wen-Jong Wu, and Wei-Hsin Liao, showcases a novel 1-axis piezoelectric MEMS accelerometer designed for low-noise applications. With impressive charge sensitivity and a natural frequency, this device is poised to advance structural health monitoring technologies.

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Playback language: English
Abstract
This study designs, fabricates, simulates, and measures a 1-axis piezoelectric MEMS accelerometer using aerosol deposition, targeting low-noise applications like structural health monitoring (SHM). The device is a cantilever beam structure with a tip proof mass and PZT sensing layer. Simulations determine its working bandwidth and noise level. Aerosol deposition enables the creation of a thick PZT film for high sensitivity. Measurements reveal a charge sensitivity of 22.74 pC/g, natural frequency of 867.4 Hz, working bandwidth of 10–200 Hz (±5% deviation), and noise equivalent acceleration of 5.6 µg/√Hz (at 20 Hz). Vibration measurements of a fan and comparison with a commercial accelerometer and the ADXL1001 demonstrate its feasibility and low noise performance.
Publisher
Microsystems & Nanoengineering
Published On
Mar 01, 2023
Authors
Xuewen Gong, Yu-Chun Kuo, Guodong Zhou, Wen-Jong Wu, Wei-Hsin Liao
Tags
MEMS accelerometer
piezoelectric
structural health monitoring
aerosol deposition
low noise
PZT sensing layer

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