This study designs, fabricates, simulates, and measures a 1-axis piezoelectric MEMS accelerometer using aerosol deposition, targeting low-noise applications like structural health monitoring (SHM). The device is a cantilever beam structure with a tip proof mass and PZT sensing layer. Simulations determine its working bandwidth and noise level. Aerosol deposition enables the creation of a thick PZT film for high sensitivity. Measurements reveal a charge sensitivity of 22.74 pC/g, natural frequency of 867.4 Hz, working bandwidth of 10–200 Hz (±5% deviation), and noise equivalent acceleration of 5.6 µg/√Hz (at 20 Hz). Vibration measurements of a fan and comparison with a commercial accelerometer and the ADXL1001 demonstrate its feasibility and low noise performance.
