Engineering and TechnologyMicrosystems & Nanoengineering
Thermoelastic damping in MEMS gyroscopes at high frequencies
D. Schiwietz, E. M. Weig, et al.
This groundbreaking research conducted by Daniel Schiwietz, Eva M. Weig, and Peter Degenfeld-Schonburg delves into the fascinating realm of thermoelastic damping (TED) and its impact on high-frequency modes of MEMS gyroscopes. By aligning simulations with real-world measurements, the study not only validates predictive design methods but also reveals the crucial role of thermoelastic effects in damping across various micro- and nanomechanical systems.
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