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Thermoelastic damping in MEMS gyroscopes at high frequencies

Engineering and Technology

Thermoelastic damping in MEMS gyroscopes at high frequencies

D. Schiwietz, E. M. Weig, et al.

This groundbreaking research conducted by Daniel Schiwietz, Eva M. Weig, and Peter Degenfeld-Schonburg delves into the fascinating realm of thermoelastic damping (TED) and its impact on high-frequency modes of MEMS gyroscopes. By aligning simulations with real-world measurements, the study not only validates predictive design methods but also reveals the crucial role of thermoelastic effects in damping across various micro- and nanomechanical systems.... show more
Citation Metrics
Citations
31
Influential Citations
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Reference Count
48
Citation by Year

Note: The citation metrics presented here have been sourced from Semantic Scholar and OpenAlex.

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