Engineering and TechnologyLight: Science & Applications
Nanoscale multi-beam lithography of photonic crystals with ultrafast laser
J. Li, J. Yan, et al.
Discover a groundbreaking multi-beam lithography technique that crafts nanoscale photonic crystals without cracking! This innovative method, explored by Jiaqun Li, Jianfeng Yan, Lan Jiang, Jiachen Yu, Heng Guo, and Liangti Qu, showcases the creation of intricate channel arrays in yttrium aluminum garnet (YAG) crystals, revolutionizing integrated photonics applications.
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