Engineering and Technology

Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

J. Li, J. Yan, et al.

Discover a groundbreaking multi-beam lithography technique that crafts nanoscale photonic crystals without cracking! This innovative method, explored by Jiaqun Li, Jianfeng Yan, Lan Jiang, Jiachen Yu, Heng Guo, and Liangti Qu, showcases the creation of intricate channel arrays in yttrium aluminum garnet (YAG) crystals, revolutionizing integrated photonics applications.

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Abstract

This paper proposes a novel multi-beam lithography method for fabricating nanoscale photonic crystals without cracking. Using multi-beam ultrafast laser processing and etching, parallel channels with subwavelength gaps are created in yttrium aluminum garnet (YAG) crystals. The gap width is controlled at the nanoscale by adjusting phase holograms, enabling the creation of complex channel array distributions. Optical gratings with varying periods are fabricated, demonstrating the method's efficiency in producing nanostructures with controllable gaps for integrated photonics applications.

Publisher

Light: Science & Applications

Published On

May 10, 2023

Authors

Jiaqun Li, Jianfeng Yan, Lan Jiang, Jiachen Yu, Heng Guo, Liangti Qu

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