Micro 3D printing of a functional MEMS accelerometer | ResearchBunny

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Abstract

This paper demonstrates a functional 3D-printed MEMS accelerometer using two-photon polymerization and metal evaporation for strain gauge transducer deposition. The accelerometer's responsivity, resonance frequency, and stability were characterized, showing the viability of 3D printing for cost-efficient, custom MEMS device production at low to medium volumes.

Publisher

Microsystems & Nanoengineering

Published On

Oct 26, 2022

Authors

Simone Pagliano, David E. Marschner, Damien Maillard, Nils Ehrmann, Göran Stemme, Stefan Braun, Luis Guillermo Villanueva, Frank Niklaus

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