Engineering and Technology

Micro 3D printing of a functional MEMS accelerometer

S. Pagliano, D. E. Marschner, et al.

Discover how a team of researchers from KTH Royal Institute of Technology and EPFL have pioneered a revolutionary 3D-printed MEMS accelerometer using innovative techniques like two-photon polymerization. Their groundbreaking work demonstrates a path towards cost-efficient, custom MEMS devices for varied applications.

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Playback language: English

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Abstract

This paper demonstrates a functional 3D-printed MEMS accelerometer using two-photon polymerization and metal evaporation for strain gauge transducer deposition. The accelerometer's responsivity, resonance frequency, and stability were characterized, showing the viability of 3D printing for cost-efficient, custom MEMS device production at low to medium volumes.

Publisher

Microsystems & Nanoengineering

Published On

Oct 26, 2022

Authors

Simone Pagliano, David E. Marschner, Damien Maillard, Nils Ehrmann, Göran Stemme, Stefan Braun, Luis Guillermo Villanueva, Frank Niklaus

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