High-speed, high-resolution imaging of surface profiles is crucial for investigating micro- and nano-scale device structures and mechanical dynamics. This paper demonstrates a line-scan time-of-flight (TOF) camera using electro-optic sampling with a frequency comb, enabling simultaneous TOF measurements of over 1000 spatial coordinates with hundreds of megapixels/s pixel rate and sub-nanometer axial resolution. This technology facilitates fast and precise 3D imaging of complex structures and dynamics in various devices and resonators.
