A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging

Wearable ultrasound imaging technology is emerging for continuous deep-tissue monitoring. Fast volumetric imaging is desirable for understanding 3D target dynamics, but current 1D arrays compromise temporal resolution and volumetric coverage, and high driving voltages hinder wearable use. This paper presents a low-voltage-driven MEMS ultrasonic phased-array transducer (a 2D pMUT array) for fast 3D volumetric imaging. By grouping pMUT cells into drive channels, a novel cell-element-array design enables 3D imaging with 5V actuation. The array achieves fast volumetric imaging (40 mm × 40 mm × 70 mm range, 11 kHz frame rate) in phantom experiments, enabling a full volumetric view of deep-tissue structures for potential long-term wearable applications.

Yun Zhang, Tong Jin, Yining Deng, Zijie Zhao, Rui Wang, Qiong He, Jianwen Luo, Jiawei Li, Kang Du, Tao Wu, Chenfang Yan, Hao Zhang, Xinchao Lu, Chengjun Huang, Hang Gao