Single-shot, coherent, pop-out 3D metrology

Three-dimensional (3D) imaging of thin, extended specimens at nanometer resolution is critical for applications in biology, materials science, advanced synthesis, and manufacturing. One route to 3D imaging is tomography, which requires a tilt series of a local region. However, capturing images at higher tilt angles is infeasible for such thin, extended specimens. Here, we explore a suitable alternative to reconstruct the 3D volume using a single, energy-filtered, bright-field coherent image. We show that when our specimen is homogeneous and amorphous, simultaneously inferring local depth and thickness for 3D imaging is possible in the near-field limit. We demonstrated this technique with a transmission electron microscope to fill a glaring gap for rapid, accessible 3D nanometrology. This technique is applicable, in general, to any coherent bright field imaging with electrons, photons, or any other wavelike particles.

Deepan Balakrishnan, See Wee Chee, Zhaslan Baraissov, Michel Bosman, Utkur Mirsaidov, N. Duane Loh