Few-Atom-Thick Pressure Sensors Based on Arrays of Double-Layer | ResearchBunny

Index

Abstract

This paper presents the development of highly sensitive pressure sensors using arrays of nearly 10,000 double-layer graphene (DLG) membranes. The design optimizes sensor elements, chip layout, and readout electronics to create a handheld, low-cost, battery-powered device capable of detecting pressure changes through graphene nanodrum deflection. A key improvement is the parallel connection of numerous membranes to enhance responsivity. The removal of a protective PMMA polymer layer through thermal annealing significantly improves sensor performance.

Publisher

Microsystems & Nanoengineering

Published On

Authors

Šiškins

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