Engineering and Technology

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

C. Ge and E. Cretu

Discover groundbreaking advancements in sensor technology with this innovative polymer piezoelectric MEMS accelerometer design by Chang Ge and Edmond Cretu. Utilizing state-of-the-art fabrication techniques, this device not only achieves impressive sensitivity but also outperforms traditional counterparts in size and noise performance.

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