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Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions
Engineering and TechnologyNature Communications

Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions

M. R. Shcherbakov, G. Sartorello, et al.

Discover groundbreaking advancements in nanofabrication as researchers, including Maxim R. Shcherbakov and Giovanni Sartorello, unveil techniques for creating deeply subwavelength silicon features using localized laser-induced phase explosions. This innovative approach achieves high aspect ratio nanotrenches, pushing the boundaries of precision in engineering microstructures.... show more
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