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Abstract
This paper presents a novel flexible pressure sensor with customizable sensitivity and linearity. The sensor achieves this through a positive design strategy utilizing a hyperelastic model and a Hertzian contact model for comparison. Microstructure distribution is pre-calculated to meet desired specifications. Three sensors demonstrated sensitivities of 0.7, 1.0, and 1.3 kPa⁻¹ over a linear region up to 200 kPa, with low sensitivity error (<5%) and high linearity (~0.99). Potential applications in physiological signal recognition are shown.
Publisher
Microsystems & Nanoengineering
Published On
Jan 01, 2023
Authors
Zhenjin Xu, Dezhi Wu, Zhiwen Chen, Zhongbao Wang, Cong Cao, Xiangyu Shao, Gang Zhou, Shaohua Zhang, Lingyun Wang, Daoheng Sun
Tags
flexible pressure sensor
customizable sensitivity
Hertzian contact model
microstructure distribution
physiological signal recognition
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