A Flexible Relative Humidity Sensor with Ultrafast Response | ResearchBunny

Index

Abstract

This paper presents a novel flexible relative humidity (RH) sensor utilizing a PDMS-Parylene C double-layer thin film substrate, vertically aligned carbon nanotubes (VACNTs) as electrodes, and graphene oxide (GO) as the sensing material. The sensor demonstrates ultrafast response, high sensitivity, good repeatability, and long-term stability. Its real-world applications in respiration monitoring, pipe leakage detection, and non-contact electric safety warnings are showcased.

Publisher

Microsystems & Nanoengineering

Published On

Authors

Wang

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